Ultra High Vacuum Crystal Window VX -with the largest diameter of the world
The only of the world, metal-sealed Ultra High Vacuum Crystal Window VX with the largest diameter, is co-developed with Japan Atomic Energy Research Institute (JAERI). Large diametral UHV window VX is the most suitable one especially for xenon lamp (172nm) which provides strong power and even luminance. As indispensable equipment for UV ozone cleaning and reforming of Si wafer, FPD and solar cell element, xenon lamp with VX window ensures you elevating of productivity, improvement of yield rate, and of course, much better quality.
The above is CF (both-edge type), any special customized specification is available.
Main Usages
- For high power xenon lamp using for UV ozone cleaning and reforming of wafer of semi-conductor equipment
- For high power xenon lamp using for UV ozone cleaning and reforming of solar cell element
- For high power xenon lamp using for UV ozone cleaning and reforming of FPD (Flat Panel Display)
- For high power xenon lamp using for UV ozone cleaning and reforming of organic EL equipment
- For viewing the inside of large radiation equipment, as high strength accelerators, Cern accelerator in Swiss, ITER in France, etc.
Outstanding Characteristics
- Effective diameter over ø440 mm (customized specification) [World's Largest]
- Detachable window material, high cost-performance [World's Only]
- If the window material is soiled by spatter, and it becomes obstructing your observation, you may detach the window material itself and polish it once again. So the window will be renewed. One polishing takes off about 0.2 mm in thickness. For example, if you order the window plus extra 5 mm in thickness, so you may have it polished and renewed for 25 times! VX assures you an unbelievable high cost performance!
- Sealed Window Material Method [World's First]
- Mechanical sealed window always retains enough elasticity so that it is hardly affected by the distortion of the flange. Therefore, the leaking, distortion or cracks are rarely happen or caused to the window.
- Pressure Resisting Structure [World's First]
- VX window are able enough to withstand the pressure from both sides.
- Thermal Strain Free [World's First]
- Since there is no thermal treatment during the assembly process, much more accurate transmission wave length may be easily obtained.
- Little gas leaking [World's First]
- Materials used for this window are only stainless steel (SUS) and aluminum (Al). Any high steam pressure metals that may contaminate the inside of the vacuum chamber such as zinc (Zn) or lead (Pb), are never used, nor any of organisms, such as resin and sealant etc are used.
- Nonmagnetic and nonradioactive [World's First]
- Ferromagnetic metals with strong radioactive, such as Kovar or Invar, are never used.
- Baking is all right in spite of the window of large diameter [World's First]
- VX window is capable of absorbing the thermal expansion difference between the window material and the flange, so despite the very large diameter, baking is possible. However, depends on the baking temperature, the equipment may be changed to water-cooling type.
- Vacuum Range
- Can be used within ultra high vacuum area like < 10-12 Torr. (Both sides of flange are all right)
- Helium Leakage
- < 0.1 x 10-10 Pam3/sec.
- In case of that the surface-area of the woke is very wide like FPD (Flat Panel Display), if you fix the every lamp of each line interserted, and make the work moving parallel, so no matter how wide and large the work it is, even illuminating is possible.
Specification of VX (As reference)
Cat. No. | VX305W | VX406W | VX506W | VX606W |
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Effective Diameter | ~170 mm | ~220 mm | ~340 mm | ~440 mm |
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Window Material | Suprasil-f310, 172 nm, Transmission ≈86 % |
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Window Thickness | 7 mm | 9 mm | 13 mm | 20 mm |
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Length | ≈18.5 mm | ≈19 mm | ≈18.5 mm | ≈20 mm |
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Water Cooling Jacket | Yes | Yes | Yes | Yes |
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Matching Wafer | 6 inch | 8 inch | 12 inch | 16 inch |
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Flange Size | ø305 mm x 44 T | ø406 mm x 47 T | ø506 mm x 50 T | ø606 mm x 60 T |
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* The above examples are only for your reference. Any customized specification is available. Please contact with us for details.
Specifications and equipment are subject to change without any notice or obligation on the part of us.